Wafer Inspection System

Wafer Equipment

Introduction

This system can automatically inspect and sort the wafers to be used for production. It has several intelligent functions, such as deep learning, machine vision, fault alert and factory MES interface.

Module Name Wafer Inspection System (Standard Wafer Inspection Module for Cell Production Line Black Silicon Inspection System Items to be inspected
Size × × Size and shape of wafer
3D × × Thickness and saw mark
Micro Crack Presence of micro-crack
Stain × Presence of stain
Chip × × Presence of chip
Resistivity × × Resistivity of wafer
P/N Type Optional × × P-type or N-type wafer
Crystal Cluster Optional × × Crystalline structure of mono-like wafer

Features