Low Pressure Chemical Vapor Deposition (LPCVD) Machine MM650

Photovoltaic Products

LPCVD machine, with mature and stable process, is one of the earliest machine for mass production of TOPcon cells

Capacity:

9400PCS/hour @182*182 cell

High average yield, good film uniformity

Our own patented air inlet system improves the uniformity and controllability of the flow field

High yield

the uniform flow of air leads to even film and high yield.
Long service life of quartz tube:

6 months of quartz tube life due to innovative quartz tube fixing design and low air consumption.
Stable temperature zone:

the reasonable layout of heating filaments contributes to good consistency and controllability, resulting in stable and controllable temperature zones.